Trikon Technologies Sigma 200 Calibration Kit 150mm 715917/A SPTS KLA Working Part No: 0100-01676

Part No: 0100-01676

BTM TC-D N

Inventory # 8445

Part No: 1259C-00100RVA

May Require Calibration This Tylan General FC-2901MEP Mass Flow Controller MFC is used working surplus

Trikon Technologies Sigma 200 Calibration Kit 150mm 715917/A SPTS KLA Working Part No: 0100-01676Trikon Technologies Sigma 200 Calibration Kit 150mm 715917 A SPTS KLA Working Inventory # CONF 1614 Part No: SIGMA 200 CALIBRATION KIT Included Components Part No: 715917 A 150MM WAFER UNCOOLER SETUP DISC Part No: 715914 A GTM CASSETTE LOCATION TOOL Part No: 715900 B 150MM DEP HSE PLATEN ARM SETUP TOOL Part No: 715903 A GTM DEP ALIGNER CASSETTE SETUP TOOL Part No: 000 1293 23, Rev. B Part No: 001 9197 06, Rev. 4 T M Trikon Part No: 156311C04 150MM ARM