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The unit does not have the factory part number tags but are visibly identical to 152-0050K-S02 (see photos)
img{max-width:100%} Toshiba Ceramics 62CL000-0197224 Susceptor TEK000048-A06-0 ASM 3552985-01 New
img{max-width:100%} KNF Neuberger PM 11488-NPK09 Diaphragm Vacuum Pump Assembly Working Surplus
img{max-width:100%} Balzers BG 019 001 Temperature Display Module ETD 101 ETD101 Used Working
Part No: 810-009281-001
Philips 4022.422.46444 Stamp Up Down PCB Card 4022.422.4644 ASML PAS Used The unit does not havePhilips 4022. 422. 46444 Stamp Up Down PCB Card 4022. 422. 4644 ASML PAS Used Inventory # 17488 This Philips 4022. 422. 46444 is used working surplus. The physical condition is good, but there are signs of previous use and handling. Removed from a ASML PAS 5000 2500 Wafer Stepper System. Specifications Part No: 4022. 422. 46444 Model No: 4022. 422. 4644 STAMP UP DOWN STAMP DOWN Removed from a ASML PAS 5000 2500 Wafer Stepper System Sale Details Item